Transient behavior of electrostatically-actuated micro systems considering squeeze film damping and mechanical shock
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Scientia Iranica
سال: 2017
ISSN: 2345-3605
DOI: 10.24200/sci.2017.4245